UF3000EX-e

Fully automatic Wafer Prober – also available for numerous special applications

Uncompromising for the throughput

Very flexible for application

Very precise navigation

Non-contact measurement

For wafers from 200 to 300 mm diameter – for special types of wafers too
Newly developed XY stage drive unit and a new algorithm for extremely high throughput
Improved Z-platform for the highest probe power – for even contact on high pin count probe cards with large surfaces
15 inch LCD Touch Screen for easy operation
Optical Target Scope (OTS) for very precise measurements of the relative positions of Probe Cards and Chucks
Tri-Colour 3-Level Magnifying for colour recording and 3 enhancement levels
Navigation Display Function – the user can manage each desired wafer point by simply touching the wafer map