UF3000EX

Fully automatic wafer prober for the highest production requirements – now even quicker and more precise

Extremely High Throughput

Highest Probe Power

Optical Measurement System

Very Precise Navigation
  • Newly developed XY stage drive unit and new calculation procedure for a very high throughput
  • Improved Z-platform for the highest probe power – for even contact on high pin count probe cards with large surfaces
  • Highly stable Z-axis with large surface spindle cleaning unit
  • 15 inch LCD Touch Screen for easy operation
  • Optical Target Scope (OTS) for very precise measurements of the relative positions of Probe Cards and Chucks
  • Tri-Colour 3-Level Magnifying for colour recording and 3 enhancement levels
  • Navigation Display Function – the user can manage each desired wafer point by simply touching the wafer map

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