UF3000EX
Fully automatic wafer prober for the highest production requirements – now even quicker and more precise
Extremely High Throughput
Highest Probe Power
Optical Measurement System
Very Precise Navigation
Highest Probe Power
Optical Measurement System
Very Precise Navigation
- Newly developed XY stage drive unit and new calculation procedure for a very high throughput
- Improved Z-platform for the highest probe power – for even contact on high pin count probe cards with large surfaces
- Highly stable Z-axis with large surface spindle cleaning unit
- 15 inch LCD Touch Screen for easy operation
- Optical Target Scope (OTS) for very precise measurements of the relative positions of Probe Cards and Chucks
- Tri-Colour 3-Level Magnifying for colour recording and 3 enhancement levels
- Navigation Display Function – the user can manage each desired wafer point by simply touching the wafer map
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