UF2000
Fully automatic Wafer Prober for a high throughput – for 120 to 200 mm wafers
Micrometer precision positioning control
Exact determination of the temperature
Highly efficient Multi-Pin Probing
Exact determination of the temperature
Highly efficient Multi-Pin Probing
- Precision +-1.5 µm, with the newest optics to determine the positioning precision
- Ultra-stable Z/θ platform for Multi-Pin Probing Contact
- Precise control of the surrounding temperature – optionally with Low Temperature Chuck or Hot Chuck
- High flexibility – numerous options such as the double loader
- Simple operation – multifunctional display and touch screen operation
- Each drive axis can be separately controlled – for optimum control of each individual component
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